SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Specification defines the leak testing requirements and leakage rates for high-purity gas piping systems and components used in semiconductor manufacturing. It is also intended as an aid in the procurement and installation of equipment, materials, and services.
This Specification applies to high-purity gas piping systems and components used in semiconductor manufacturing facilities and comparable research and development areas.
It includes testing methods for complete systems, subsystems, and individual components.
It states requirements for both the user and manufacturer and establishes leak rate limits for acceptance testing and qualification testing.
Referenced SEMI Standards
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment