SEMI F2 - Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications -
NOTICE: This Document was balloted and approved for
withdrawal in 2003.
The purpose of this Specification is to identify the
applicable ASTM tubing specification requirements and to define the special
material chemical composition requirements for 316L stainless steel tubing
which is to be used for general purpose applications in semiconductor
This Specification covers grades of nominal-wall-thickness
stainless steel tubing as designated in Table 1 of ASTM A269, for use in
chemical (gas or liquid) distribution systems in semiconductor manufacturing
facilities and in comparable research and development areas.
Referenced SEMI Standards (purchase separately)
SEMI F2-94 (Withdrawn 0703) (combined with SEMI F20-0704)
SEMI F2-94 (technical revision)
SEMI F2-94 (first published)
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