SEMI F3 - Guide for Welding Stainless Steel Tubing for Semiconductor Manufacturing Applications -
NOTICE: This Document was balloted and approved for withdrawal in 2003.
The purpose of this Guide is to provide instructions to increase the awareness of the user to the available procedures for welding stainless steel gas distribution systems, and to provide information from which subsequent evaluations and standardization can be derived.
This Guide covers the general requirements for the welding of stainless steel gas distribution systems.
Referenced SEMI Standards (purchase separately)
SEMI F2 — Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications
SEMI F3-94 (Withdrawn 1103)
SEMI F3-94 (technical revision)
SEMI F3-94 (first published)
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