SEMI F3 - Guide for Welding Stainless Steel Tubing for Semiconductor Manufacturing Applications -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI F3-94 (Withdrawn 1103) - Withdrawn



NOTICE: This Document was balloted and approved for withdrawal in 2003.

The purpose of this Guide is to provide instructions to increase the awareness of the user to the available procedures for welding stainless steel gas distribution systems, and to provide information from which subsequent evaluations and standardization can be derived.

This Guide covers the general requirements for the welding of stainless steel gas distribution systems.


Referenced SEMI Standards (purchase separately)

SEMI F2 — Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications


Revision History

SEMI F3-94 (Withdrawn 1103)

SEMI F3-94 (technical revision)

SEMI F3-94 (first published)

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