F00400 - SEMI F4 - 空気圧動作シリンダバルブの仕様

Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)

本仕様は,Global Facilities Committeeで技術的に承認されたもので,North American Facilites Committeeが直接責任を負うものである。現版は2000828日にNorth American Regional Standards Committeeにて承認された。20009月にまずSEMI On Lineで入手可能になり,200010月発行に至る。初版は1990年発行,前版は20002月発行。








Referenced SEMI Standards

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components

SEMI F19 — Specification for the Finish of the Wetted Surfaces of Electropolished 316L Stainless Steel Components

SEMI F20 — Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications

SEMI F32 Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves

SEMI S5 — Safety Guideline for Flow Limiting Devices

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $135.00
Regular price Non-Member Price: $180.00