SEMI F4 - Specification for Pneumatically Actuated Cylinder Valves -
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Specification establishes the minimum design and performance requirements for pneumatically actuated cylinder valves used in semiconductor manufacturing. It is also intended as an aid in the procurement of these valves.
This Specification applies to pneumatically actuated valves for use on cylinders containing gases used in semiconductor manufacturing facilities and in comparable research and development areas.
Referenced SEMI Standards
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Electropolished 316L Stainless Steel Components
SEMI F20 — Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate and Tubing Investment Castings for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
SEMI F32 — Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
SEMI S5 — Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves
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