F00600 - SEMI F6 - 危険ガス配管システムの二次封じ込め(ガイドライン)

Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)



本ガイドラインは,Uniform Building CodeH-6の分類,Uniform Fire Code51条又は80条,又はその他適用できるローカルコード,の監督下に置かれている産業において,危険な生産品材料を供給するパイプ類のための一般的要求条件をカバーするものである。


Referenced SEMI Standards

SEMI F1 — Specification for Leak Integrity of Toxic Gas Piping Systems
SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S4 — Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets

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