SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems
The purpose of this document is to provide a guide for the design, fabrication, and operation of secondarily contained distribution piping for hazardous production material (HPM) gases.
This guide covers the general requirements for hazardous production material distribution piping in those industries that are included under the H-6 Classification of the Uniform Building Code, or Articles 51 or 80 of the Uniform Fire Code, or of other applicable local codes. This guide does not include requirements for individual exhausted enclosures (e.g., valve boxes and gas cabinets).
Referenced SEMI Standards
SEMI F1 — Specification for Leak Integrity of Toxic Gas Piping Systems
SEMI F2 — Specification for Seamless Austenitic Stainless Steel Tubing for Semiconductor Manufacturing Applications
SEMI F3 — Guide for Welding Stainless Steel Tubing for Semiconductor Manufacturing Applications
SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S4 — Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets