SEMI F9 - Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition -

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Revision: SEMI F9-0998 - Inactive



NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This method provides a uniform procedure to determine the leakage characteristics of tube fitting connections made of fluorocarbon materials, when subjected to side loading.


This method can be used to characterize tube fitting connections on the basis of test data developed under the conditions described herein, but the results are not intended to imply a performance rating.


Tube defined in this method has a circular cross section and is made of fluorocarbon materials.


All parts of the tube fittings tested by this method in contact with the internal fluid are made of fluorocarbon materials.

• Parts such as a nut or gripper are not limited to being made of a fluorocarbon material.


Only the seal between the tube and tube fitting being evaluated is within the scope of this document. All other, threaded seals are beyond the scope of this document.


When using this method for making comparisons between various tube fittings and/or manufacturers, the user must be specific in the selection of the tube and tube fittings to be evaluated.


The International System of Units (SI) is used as the standard unit of measure in this document. The U.S. Customary units are in parentheses for reference purposes only and may have been rounded to the nearest whole value.


Referenced SEMI Standards


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