F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings, after they have been subjected to an elevated ambient temperature and cooled to room temperature (hereafter referred to as a "Heat Cycle").


This method can be used to characterize the thermal characteristics of tube fitting connections on the basis of test data obtained under the conditions described herein, but the results are not intended to imply a performance rating.


When using this test method, a fitting body temperature range of 23°C to 125°C (73°F to 257°F) should be maintained.


Tube defined in this method is made of fluorocarbon materials.


Tube fittings defined in this method are made of fluorocarbon materials for all parts in contact with the internal fluid. Parts such as nuts and grippers are not limited to being made of a fluorocarbon material.


Only the seal between the tube and tube fitting being evaluated is within the scope of this document. All other seals are beyond the scope of this document.


When using this method for making comparisons between various tube fitting manufacturers, the user must be specific in the selection of the tube and tube fittings to be evaluated.


Referenced SEMI Standards


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