SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures -

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Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI F14-93 (Reapproved 0699) - Inactive



This standard was technically reapproved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available on February 1999; to be published June 1999. Originally published in 1993.

Editorial changes were made to §§ 3.1.1, 6.2.1, and 6.2.2.


This document summarizes gas source equipment enclosure design considerations. It is intended for use by manufacturers and purchasers.


Design considerations pertaining to gas source equipment enclosures are described herein. Modifications required to accommodate specific gases, cylinders, or unusual applications (e.g., process equipment) are not addressed.


Referenced SEMI Standards

SEMI S4 — Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets

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