F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
Abstract

This specification was technically reapproved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on October 25, 2002. Initially available at www.semi.org December 2002; to be published March 2003. Originally published in 1995.

 

NOTICE: This document was balloted and approved for withdrawal in 2004.

 

The purpose of this specification is to define the ordering, surface condition, and quality assurance requirements for high purity quality electropolished 316L stainless steel tubing, component tube stubs, and fittings made from tubing.

 

This specification defines the special criteria for nominal sizes of electropolished 316L stainless steel tubing, component tube stubs, and fittings made from tubing for use in high purity chemical (gas or liquid) distribution systems in semiconductor manufacturing facilities.

 

Referenced SEMI Standards

SEMI F16 — Specification for 316L Stainless Steel Tubing Which Is to Be Finished and Electropolished for High Purity Semiconductor Manufacturing Applications

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