F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様

Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Gases Committeeで技術的に承認されている。現版は20091216日,global Audits and Reviews Subcommitteeにて発行が承認された。20102月にwww.semi.orgで入手可能となる。初版は19952月発行,前版は20043月発行。


注意: 本文書は,編集上の修正を伴って,再承認された。




本仕様では,SEMI F20に従いステンレス鋼で製作された配管や部品の接ガス・接液面の特性評価に関する要求条件および仕上げの合格判定基準について定義し,また半導体製造で使用される気体と液体の管理や収納を目的としている。






Referenced SEMI Standards

SEMI F20 — Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate, and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications

SEMI F37 — Method for Determination of Surface Roughness Parameters for Gas Distribution System Components

SEMI F60 — Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

SEMI F70 — Test Method for Determination of Particle Contribution of Gas Delivery System

SEMI F72 — Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components

SEMI F73 — Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components

SEMI F77 — Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas Systems

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