SEMI F19 - Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015; originally published in 1995; previously published March 2010.
The purpose of this Specification is to provide a standard for the quality of the wetted surfaces of stainless steel components used in the chemical (gas and liquid) distribution systems of semiconductor manufacturing facilities.
This Specification defines the wetted surface characterization requirements and the finish acceptance criteria for tubing and components fabricated in stainless steel per SEMI F20 and intended to control or contain gases and liquids used in semiconductor manufacturing.
The surface characterization tests to be performed are specified herein, and the existing standards for performing these tests are referenced.
Terms specific to this technology are either listed herein as they relate to the acceptance criteria of this Specification or are defined in the referenced documents as they relate to a specific test method.
Referenced SEMI Standards
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
SEMI F37 — Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
SEMI F60 — Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components
SEMI F70 — Test Method for Determination of Particle Contribution of Gas Delivery System
SEMI F72 — Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components
SEMI F73 — Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components
SEMI F77 — Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas Systems