F02000 - SEMI F20 - Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
The purpose of this Specification is to define the metallurgical cleanliness requirements and material composition of 316L stainless steel required for use in the manufacture of components for general purpose, high purity, and ultra-high purity chemical (gas or liquid) distribution systems.
This Specification defines the requirements for 316L stainless steel bar, forgings, and extruded shapes as specified in ASTM A276, plate stock as specified in ASTM A240, and tubing as specified in ASTM A269 and ASTM A632, for use in the manufacture of components used in general purpose and high purity chemical (gas or liquid) distribution systems in semiconductor manufacturing facilities.
Referenced SEMI Standards (purchase separately)
SEMI F20-0706E (Reapproved 0917)
SEMI F20-0706E (Reapproved 0611)
SEMI F20-0706E (editorial revision)
SEMI F20-0706 (technical revision)
SEMI F20-0305 (technical revision)
SEMI F20-0704 (technical revision, rewritten to combine SEMI F2)
SEMI F20-0997 (technical revision)
SEMI F20-95 (first published)
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