F02000 - SEMI F20 - 用于通用、高纯和超高纯半导体制造组件的316L不锈钢棒材、锻材、挤压型材、板材和管材的规范

SEMI F20 - 用于通用、高纯和超高纯半导体制造组件的316L不锈钢棒材、锻材、挤压型材、板材和管材的规范 -

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Volume(s): Facilities
Language: Chinese (Simplified)
Type: Single Standards Download (.pdf)
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Revision: SEMI F20-0706E (Reapproved 0917) - Superseded

Revision

Abstract



NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

注意：这个翻译是一个参考版本。如果您在使用上，发现中文翻译版本与英文原文版本产生任何差异或是不确定之处，请务必参考英文原文版本，并以英文原文版本为主，英文原文版本属于正式和权威的版本。

 

本规范的目的是定义用于制造通用、高纯和超高纯化学（气体或液体）分配系统部件的316L不锈钢的冶金洁净度要求和材料成分。


该规范定义了符合ASTM A276的棒材、锻材和挤压型材，ASTM A240的板材，和ASTM A269和ASTM A632管材等标准中316L不锈钢的要求，用于生产半导体制造设备设施中的通用的组件和高纯化学（气体或液体）分配系统。 

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