SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in October 2016; originally published in 1995; previously published November 2002.
NOTICE: This Document was completely rewritten in 2016.
The purpose of this Standard is to classify microelectronics clean environments with respect to their molecular (non-particulate) contaminant levels. This Classification provides a consistent means of communicating acceptable contaminant levels of groups of specific airborne molecular contaminants. See Related Information 1 appended to this Standard.
This Classification is to be used in the specification of semiconductor clean environments (including process tool environments) and of contamination control and measurement equipment performance.
Referenced SEMI Standards