SEMI F22 - Guide for Bulk and Specialty Gas Distribution Systems
This Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in May 2018; originally published in 1997; previously published August 2012.
This reference Document is intended to outline for the user the common systems configurations, components, and subcomponents of high purity gas distribution systems in a semiconductor fabrication facility. Related specifications are also noted.
Outlined in this Document are both bulk and specialty gas distribution systems.
Components and subcomponents are identified from the point-of-supply to the point-of-connection to the process equipment.
Referenced SEMI Standards