SEMI F24 - Specification for Particle Concentration of Grade 10/0.2 Inert Specialty Gases
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in December 2017; originally published June 1997; previously published July 2012.
The purpose of this Document is to set a maximum permissible particle concentration for 10/0.2 grade inert specialty gases and to describe a reference method for its verification.
This Document applies only to inert gases delivered through specialty gas systems at pressures up to 8 × 105 Pa (8 atmospheres). This method is not suitable for direct sampling from high pressure cylinders at pressures above 8 × 105 Pa (8 atmospheres). This Document applies only to the following gases:
• Argon (Ar)
• Halocarbon 23 (CHF3)
• Halocarbon 116 (C2F6)
• Helium (He)
• Nitrogen (N2)
• Sulfur hexafluoride (SF6)
• Tetrafluoromethane (CF4)
Referenced SEMI Standards
SEMI C6.5 — Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas