SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) -

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Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI F27-0997 (Reapproved 0611) - Inactive



This Standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2011. Available at and in June 2011; originally published September 1997; previously published November 2003.


This test will determine the quantity of removable moisture and the degree of interaction with trace concentrations of gas phase moisture, of gas distribution systems and components. atmospheric pressure ionization mass spectrometry (APIMS) is currently the technique of choice for such tests because it is essentially the only commercially available method capable of ppt moisture analysis and because of its superior response time. This method may provide guidelines for the application of other techniques with similar detection limits and response time to APIMS which are not commercially available at this time.


The results of this test can be used for qualitative ranking of systems and components and can also be used, by a sufficiently sophisticated user, as input for numerical simulation of distribution system behavior.


Referenced SEMI Standards

SEMI C15 — Test Method for ppm and ppb Humidity Standards

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