SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Test Method will determine the quantity of removable moisture and the degree of interaction with trace concentrations of gas phase moisture, of gas distribution systems and components. atmospheric pressure ionization mass spectrometry (APIMS) is currently the technique of choice for such tests because it is essentially the only commercially available method capable of ppt moisture analysis and because of its superior response time. This method may provide guidelines for the application of other techniques with similar detection limits and response time to APIMS which are not commercially available at this time.

The results of this Test Method can be used for qualitative ranking of systems and components and can also be used, by a sufficiently sophisticated user, as input for numerical simulation of distribution system behavior.

System and Component Types — This procedure applies to in-line components to be used to contain electronics grade materials in semiconductor gas distribution systems. The following components are expected to yield meaningful results when tested according to the present method: tubing, connectors (fittings), particle filters, valves (check, relief, shut-off, and metering), regulators, flow-through transducers/sensors, mass flow controllers and meters. Components with dead volumes, such as pressure gauges, can be tested according to this method, but the results will be difficult to interpret. Additional criteria besides those considered here need to be developed for testing components with dead volumes.

Referenced SEMI Standards (purchase separately)

SEMI C15 — Test Method for ppm and ppb Humidity Standards

Revision History

SEMI F27-0997 (Reapproved 0611)

SEMI F27-0997 (Reapproved 1103)

SEMI F27-0997 (first published)

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