SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Standard defines the purge efficacy test method recommended for determining the minimum acceptable level of purge efficacy for gas source systems used in semiconductor manufacturing. It is also intended as an aid to the procurement of gas source equipment.

This Test Method applies to gas source equipment used in semiconductor manufacturing facilities and comparable research and development areas. It includes contamination testing requirements for gas source systems.

The tests covered by this Standard are as follows:

• Purge efficacy with a non-interactive gas using manufacturers’ standard purge sequence.
• Purge efficacy with a non-interactive gas using the test method specified purge sequence.
• Purge efficacy with an interactive gas using manufacturers’ standard purge sequence.
• Purge efficacy with an interactive gas using the test method specified purge sequence.

Referenced SEMI Standards (purchase separately)

None.

Revision History

SEMI F29-0997 (Reapproved 0517)

SEMI F29-0997 (Reapproved 0611)

SEMI F29-0997 (Reapproved 1103)

SEMI F29-0997 (first published)

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