F03000 - SEMI F30 - 据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証

Volume(s): Facilities
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Gases Interfaces & Carriers Committeeで技術的に承認されている。現版は2010430日,global Audits and Reviews Subcommitteeにて発行が承認された。20106月にwww.semi.orgで入手可能となる。初版は1998年発行。




Referenced SEMI Standards

SEMI F58 — Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectroscopy (APIMS)
SEMI F68 — Test Method for Determining Purifier Efficiency

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