SEMI F30 - Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 2, 2017. Available at www.semiviews.org and www.semi.org in May 2017; originally published in 1998; previously published July 2010.
The purpose of this Test Method is to verify the performance of purifiers during start-up by employing analytical instrumentation to measure gas impurities and particles to customer specifications. If specific inlet challenge(s) and/or inlet measurements are required, it should be discussed beforehand with the customer. Inlet impurities must be measured by part-per-million (ppm) or part-per-billion (ppb) analytical equipment. This procedure applies only to large scale bulk purifiers rated at greater than 50 liters-per-minute (LPM) flow rate.
Verification of performance of large scale purifiers in nitrogen, argon, helium, oxygen, and hydrogen service. Verification tests are done at ppb or sub-ppb levels of gaseous impurities and sub-micron sizes of particles measured downstream of any installed filter modules. Tests are done at maximum achievable flow of purifier, and/or customer’s specified percentages of maximum rated flow.
Referenced SEMI Standards
SEMI F58 — Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectroscopy (APIMS)
SEMI F68 — Test Method for Determining Purifier Efficiency
SEMI F112 — Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)