SEMI F31 - Guide for Bulk Chemical Distribution Systems -

Abstract

NOTICE: This Standard was completely rewritten in 2024.

1  Purpose
1.1  This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS.
2  Scope
2.1  This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes.

Referenced Standards and Documents (purchase separately)
SEMI F39 — Guide for Chemical Blending Systems
SEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing

Revision History
SEMI F31-0724 (complete rewrite)
SEMI F31-0313 (technical revision)
SEMI F31-0698 (first published)

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