SEMI F31 - Guide for Bulk Chemical Distribution Systems
This Standard was technically approved by the global Liquid Chemicals Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2012. Available at www.semiviews.org and www.semi.org in March 2013; originally published June 1998.
NOTICE: This Document was completely rewritten in 2012.
This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS.
This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes.
Referenced SEMI Standards
SEMI E49 — Guide for Standard Performance, Practices, and Sub-Assembly for High Purity Piping Systems and Final Assembly for Semiconductor Manufacturing Equipment
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment