F03300 - SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)
This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008. Originally published in 1998.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This test method may provide guidelines for the calibration of the APIMS for measurement of impurities in nitrogen, argon, helium and hydrogen. APIMS is currently the technique of choice for measurements of low level impurities in gas distribution systems and components because it is essentially the only commercially available method capable of ppt impurity analysis and it has a superior response time. This method may provide guidelines for application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time.
This method applies to the analyte calibration of the APIMS for a target impurity range of 100 ppt to as high as 200 ppb impurity range. The actual calibration range should bracket the impurity measurement range of interest, dependent upon the measurement to be conducted. Anything else is outside the range of the calibration.
Referenced SEMI Standards
SEMI C9.1 — Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
SEMI C15 — Test Method for ppm and ppb Humidity Standards
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