SEMI F34 - Guide for Liquid Chemical Pipe Labeling -

Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published in September 1998.

　

This Document establishes a recommended scheme for labeling liquid process chemical piping systems used in semiconductor manufacturing facilities and equipment.

　

Consistent labeling system facilitates rapid identification of piping contents and avoids confusion within the industry by eliminating the need for each company or locality to develop their own guides.

 

This Guide applies to components typically found in a liquid process chemical piping system for semiconductor manufacturing processes. The following list of included components is not exhaustive:

• Piping

• Valves

• Filters

• Regulators

• Tubing

　

Referenced SEMI Standards

None.

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