F03600 - SEMI F36 - Guide for Dimensions and Connections of Gas Distribution Components

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www.semiviews.org and www.semi.org in September 2013. Originally published in 1993; previously published November 2004.


The purpose of this Guide is standardization of dimensional and mechanical/electrical connection attributes for components used within gas distribution systems. Standardization of these component interfaces will allow for interchangeability of gas distribution system components. Filters/purifiers, shut-off valves, pressure regulators, MFC/MFMs, and pressure transducers are the types of gas distribution components that would benefit from being interchangeable.


This Guide is for use with 1/4-inch distribution systems at operating pressures no greater than 345 kPa (50 psi).


The guide includes the following items:


Physical characteristics specific to each component. These include a generalized drawing of the component, specific end-to-end lengths for each type of end connection, maximum envelope dimensions, base-to-centerline dimensions, tolerances, and bottom mounting information.


Electrical connections specific to each component, where applicable. These include pin-outs and types of connectors.


Referenced SEMI Standards


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