SEMI F37 - Test Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in March 2018; originally published February 1999; previously published June 2011.
The purpose of this Test Method is to define a method for determining numerical values for surface roughness parameters measured on gas distribution system components. Application of this Test Method is intended to yield comparable data among users of this Test Method.
This Document will specify methods, measuring equipment, and test conditions for mechanical profile surface roughness measurement of gas distribution system components. This Test Method will not require nor recommend numerical values for specific surface roughness parameters. This Test Method is intended for use in quality control and process development for specification of and manufacturing of gas distribution system components.
Referenced SEMI Standards