SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters -

Abstract

NOTICE: This Document was completely rewritten in 2019.

The purpose of this Document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using point-of-use (POU) gas filters.

This Test Method defines an evaluation method for POU filters of various media (e.g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. POU filters are designed to handle relatively low flow rates (0.5 to 50 slm) and moderately high pressure drops. The filter housing and filtration element are combined into one sealed and inseparable unit.

This Test Method is intended to demonstrate the ability of a POU gas filter to equal or exceed a specific particle filtration efficiency class when challenged with a monodispersed aerosol in the size range described in § 7.6.

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