SEMI F39 - Guide for Chemical Blending Systems -
Abstract
This Guide establishes terminology, blend technique classification(s), system specification(s), performance characterization, and qualification methods for liquid chemical blending equipment.
This Guide applies to chemical blending equipment interfaced with bulk chemical distribution systems (BCDS).
Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI E49.2 — Guide for the Qualification of Polymer Assemblies Used for Liquid Chemical Systems in Semiconductor Equipment
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Revision History
SEMI F39-0621 (technical revision)
SEMI F39-0315 (complete rewrite)
SEMI F39-0699 (first published)
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