SEMI F39 - Guide for Chemical Blending Systems
NOTICE: This Document was completely rewritten in 2014.
This Guide establishes terminology, blend technique classification(s), system specification(s), performance characterization, and qualification methods for liquid chemical blending equipment.
This Guide applies to chemical blending equipment interfaced with bulk chemical distribution systems (BCDS).
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI F31 — Guide for Bulk Chemical Distribution Systems
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment