SEMI F39 - Guide for Chemical Blending Systems -

Abstract

This Guide establishes terminology, blend technique classification(s), system specification(s), performance characterization, and qualification methods for liquid chemical blending equipment.

This Guide applies to chemical blending equipment used within a semiconductor manufacturing facility for the purposes of producing chemicals used for wafer processing.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI E49.2 — Guide for the Qualification of Polymer Assemblies Used for Liquid Chemical Systems in Semiconductor Equipment
SEMI F31 — Guide for Bulk Chemical Distribution Systems
SEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

Revision History
SEMI F39-1223 (complete rewrite)
SEMI F39-0315 (complete rewrite)
SEMI F39-0699 (first published)

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