SEMI F40 - Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in September 2018; originally published June 1999; previously published May 2005.

 

NOTICE: This Document was reapproved with minor editorial changes.

 

This Document defines component preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components.

 

This Document includes preparation procedures that can be applied to components such as tubing, piping, valves, regulators, fittings, gaskets, O-rings, and filter housings.

 

This Document defines and specifies all of the component pretreatment and analyze preparation procedures for liquid chemical distribution system components common to the test methods listed (see Table 3). Each type of component should be pretreated and prepared according to the procedures of this Document before it can be tested using the identified chemical test methods.

 

This Document defines preparation and pretreatment procedures used for the evaluation of liquid chemical distribution system components in test fluids. This Practice is intended for use with 49% hydrofluoric acid (HF), 30% hydrogen peroxide (H2O2), 29% ammonium hydroxide (NH4OH), isopropyl alcohol (IPA) and ultrapure water (UPW). The Document defines the purity of chemicals that can be used for leaching and rinsing liquid chemical distribution system components.

 

Referenced SEMI Standards

None.

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