F04000 - SEMI F40 - Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing
This Practice defines preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components and neat polymer used in their manufacture.
This Practice includes preparation procedures that can be applied to components such as tubing, piping, valves, regulators, fittings, gaskets, O-rings, and filter housings as well as to neat polymers.
This Practice defines and specifies all of the pretreatment and analysis preparation procedures for liquid chemical distribution system components and neat polymers common to SEMI F48 and SEMI F57. Each type of component or neat polymer sample shall be pretreated and prepared according to the procedures of this Practice before it can be tested using the identified chemical test methods.
This Practice is intended for use with 49% hydrofluoric acid (HF), 30% hydrogen peroxide (H2O2), 29% ammonium hydroxide (NH4OH), isopropyl alcohol (IPA) and ultrapure water (UPW). This Practice defines the purity of chemicals that can be used for extracting and rinsing liquid chemical distribution system components. Other chemicals may be used as well.
Referenced SEMI Standards (purchase separately)
SEMI C69 — Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI F48 — Test Method for Determining Trace Metals in Polymer Materials
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F40-0621 (technical revision)
SEMI F40-0699E (Reapproved 0918)
SEMI F40-0699E (editorial revision)
SEMI F40-0699 (first published)
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