SEMI F41 - Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in November 2016; originally published June 1999.
NOTICE: This Document was completely rewritten in 2016.
This Guide sets forth a logical and systematic approach to the qualification of bulk chemical distribution systems (BCDS) that may be used by end users and suppliers as a basis for developing site-specific BCDS specifications.
The qualification processes cover:
Bulk distribution systems for large transfer facilities such as main unloading tank facilities that would transfer to smaller day tanks or transport vessels.
Bulk distribution systems at the facility level that receive from another system and dispense fab wide or to multiple points of use.
Bulk distribution system that dispenses only to a specific use system.
Bulk distribution systems that dispense to other smaller systems not specified above.
This Guide assumes that the BCDS has been installed per the BCDS manufacturer’s recommendations and the customer’s specifications, and has been appropriately leak tested and shown to meet all requirements of mechanical and physical integrity up to the point of use (POU). For purposes of this document a POU is taken to be: a vessel, a subsystem, a fab wide or multi point distribution system, or a process consumption point.
BCDS are typically tested for particle levels and trace metal impurities according to specified levels agreed upon in advance. For certain applications or specific chemicals, other testing may become incorporated in the qualification process. These other tests may include assay analysis, anion analysis, cation analysis, total oxidizable carbon (TOC) analysis, moisture analysis, extractables, and other impurities.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems