SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials -

Abstract

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25, 2014. Available at www.semiviews.org and www.semi.org in December 2014; originally published June 2000; previously published July 2009.

　

This method provides a procedure for determining the nonvolatile trace inorganic impurities in bulk polymeric materials.

　

Following digestion by dry ashing (DDA) or digestion in closed vessel (DCV) preparation techniques, samples previously obtained and cleaned according to SEMI F40 are analyzed for trace inorganics using inductively coupled plasma-mass spectrometry (ICP-MS), graphite furnace atomic absorption spectroscopy (GFAAS), and/or inductively coupled plasma-atomic emission spectroscopy (ICP-AES).

　

Materials for analysis include, but are not limited to:

• Raw polymer materials (resins), such as pellets of perfluoroalkoxy (PFA), polyvinylidene fluoride (PVDF), ethylenechlorotrifluoroethylene (ECTFE), polyetheretherketone (PEEK), polypropylene (PP), polyethylene (PE), acetal resin, polyvinyl chloride (PVC), Perfluoromethylether-based Perfluoro-alkoxy (MFA) and powders of polytetrafluoro-ethylene (PTFE).
• Polymer components of tubing, piping, fittings, valves, regulators, filter housings, filter cartridges, O-rings and gaskets used in ultrapure water (UPW) and liquid chemical distribution systems (LCDS). See ¶ 3.8 for further information.
• Ion-exchange resins.
• Polymer products used in the manufacturing of semiconductor devices, such as wafer carriers and wands, as well as accessories internal to wet equipment (e.g., drums in spin rinse dryers, tanks in quick dump rinsers). See ¶ 3.8 for further information.

　

The DDA sections of this Document refer to an ashing technique, whereby the sample is placed into a platinum or quartz crucible and thermally decomposed. Thermal decomposition in muffle furnace or microwave muffle furnace may also be used. Additionally, oxygen plasma may be used separately or in conjunction with these techniques.

　

The DCV sections of this Document refer to closed vessel microwave acid decomposition at elevated temperature and pressure. Alternatively closed vessel thermal conduction heating may also be applied.

　

ICP-MS, GFAAS, and ICP-AES are all appropriate methods for inorganic analysis. ICP-MS is the preferred method because it is more sensitive and efficient. Alternate procedures may be used if they meet the same analytical performance criteria. Each laboratory is responsible for verifying the validity of each method within its own operation.

　

This method is applicable for the elements found in Table 1.

Table 1 List of Applicable Elements (See #1)
Aluminum	Magnesium
Barium	Manganese
Calcium	Nickel
Chromium	Potassium
Cobalt	Sodium
Copper	Strontium
Iron	Tin
Lead	Titanium
Lithium	Zinc
Molybdenum	Zirconium
#1 See Limitations, ¶ 3.3.

　

This method may be used for other materials, or other nonvolatile elements, if the end-user wishes and performance is demonstrated for the analyte of interest, in the matrices of interest, at the concentration levels of interest.

　

Referenced SEMI Standards

SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing

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