SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials -

Abstract

NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

1  Purpose
1.1  This Test Method provides a procedure for determining the nonvolatile trace inorganic impurities in bulk polymeric materials.
2  Scope
2.1  Following digestion by dry ashing (DDA) or digestion in closed vessel (DCV) preparation techniques, samples previously obtained and cleaned according to SEMI F40 are analyzed for trace inorganics using inductively coupled plasma-mass spectrometry (ICP-MS), graphite furnace atomic absorption spectroscopy (GFAAS), and/or inductively coupled plasma-atomic emission spectroscopy (ICP-AES).
2.2  Materials for analysis include, but are not limited to:
• Raw polymer materials (resins), such as pellets of perfluoroalkoxy (PFA), polyvinylidene fluoride (PVDF), ethylenechlorotrifluoroethylene (ECTFE), polyetheretherketone (PEEK), polypropylene (PP), polyethylene (PE), acetal resin, polyvinyl chloride (PVC), Perfluoromethylether-based Perfluoro-alkoxy (MFA) and powders of polytetrafluoro-ethylene (PTFE).
• Polymer components of tubing, piping, fittings, valves, regulators, filter housings, filter cartridges, O-rings and gaskets used in ultrapure water (UPW) and liquid chemical distribution systems (LCDS). Refer to ¶ 3.8 for further information.
• Ion-exchange resins.
• Polymer products used in the manufacturing of semiconductor devices, such as wafer carriers and wands, as well as accessories internal to wet equipment (e.g., drums in spin rinse dryers, tanks in quick dump rinsers). Refer to ¶ 3.8 for further information.
2.3  The DDA sections of this Test Method refer to an ashing technique, whereby the sample is placed into a platinum or quartz crucible and thermally decomposed. Thermal decomposition in muffle furnace or microwave muffle furnace may also be used. Additionally, oxygen plasma may be used separately or in conjunction with these techniques.
2.4  The DCV sections of this Test Method refer to closed vessel microwave acid decomposition at elevated temperature and pressure. Alternatively closed vessel thermal conduction heating may also be applied.
2.5  ICP-MS, GFAAS, and ICP-AES are all appropriate methods for inorganic analysis. ICP-MS is the preferred method because it is more sensitive and efficient. Alternate procedures may be used if they meet the same analytical performance criteria. Each laboratory is responsible for verifying the validity of each method within its own operation.
2.6  This Test Method is applicable for the elements found in Table 1.
2.7  This Test Method may be used for other materials, or other nonvolatile elements, if the end-user wishes and performance is demonstrated for the analyte of interest, in the matrices of interest, at the concentration levels of interest.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI F48-0600 (Reapproved 1214)
SEMI F48-0600 (Reapproved 1214)
SEMI F48-0600 (Reapproved 0709)
SEMI F48-0600 (technical revision)
SEMI F48-0200 (first published)

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