SEMI F49 - Guide for Semiconductor Factory Systems Voltage Sag Immunity -

Abstract

A guide defining a systems approach to power conditioning is needed for semiconductor and flat panel display (FPD) facilities. Semiconductor and FPD factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor and FPD processing equipment are especially vulnerable to voltage sags. The facility electrical system distributes power to process equipment, support equipment, and facility infrastructure equipment. Facility electrical distribution systems should be designed to integrate the voltage sag susceptibility of all the equipment with the power quality supplied by the utility. Installing effective and efficient facilities power conditioning requires identification of appropriate conditioning technologies and properly applying the conditioning equipment.

 

Utilizing recommendations in this Guide should result in effective power conditioning of the facility electrical distribution system such that the process equipment, associated support equipment and facilities infrastructure equipment function within acceptable ranges.

This Guide is intended for facilities engineers, equipment engineers, and facilities managers who specify compatibility requirements for equipment and utility services, and in particular for electrical power requirements such as those found in SEMI E51.

 

Referenced SEMI Standards (purchase separately)

SEMI E51 — Guide for Typical Facilities Services and Termination Matrix

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

 

Revision History

SEMI F49-0200 (Reapproved 1021)

SEMI F49-0200 (Reapproved 1213)

SEMI F49-0200 (Reapproved 1108)

SEMI F49-0200 (first published)

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