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SEMI F49 - Guide for Semiconductor Factory Systems Voltage Sag Immunity -
Abstract
A guide defining a systems approach to power conditioning
is needed for semiconductor and flat panel display (FPD) facilities.
Semiconductor and FPD factories require high levels of power quality due to the
sensitivity of equipment and process controls. Semiconductor and FPD processing
equipment are especially vulnerable to voltage sags. The facility electrical
system distributes power to process equipment, support equipment, and facility
infrastructure equipment. Facility electrical distribution systems should be
designed to integrate the voltage sag susceptibility of all the equipment with
the power quality supplied by the utility. Installing effective and efficient
facilities power conditioning requires identification of appropriate
conditioning technologies and properly applying the conditioning equipment.
Utilizing recommendations in this Guide should result in
effective power conditioning of the facility electrical distribution system
such that the process equipment, associated support equipment and facilities
infrastructure equipment function within acceptable ranges.
This Guide is intended for facilities engineers, equipment
engineers, and facilities managers who specify compatibility requirements for
equipment and utility services, and in particular for electrical power
requirements such as those found in SEMI E51.
Referenced SEMI Standards (purchase separately)
SEMI E51 — Guide for Typical Facilities Services and
Termination Matrix
SEMI S2 — Environmental, Health, and Safety Guideline for
Semiconductor Manufacturing Equipment
Revision History
SEMI F49-0200 (Reapproved 1021)
SEMI F49-0200 (Reapproved 1213)
SEMI F49-0200 (Reapproved 1108)
SEMI F49-0200 (first published)
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