SEMI F51 - Guide for Elastometric Sealing Technology
This Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 28, 2017. Available at www.semiviews.org and www.semi.org in September 2017; originally published February 2000; previously published November 2015.
O-rings were originally developed for industrial markets and much later for aerospace. Current industry standards do not specifically relate to semiconductor seal performance. This Document is a basic guide for the use of seals in semiconductor fabrication equipment. This Document also provides guidance for choosing appropriate sealing materials by understanding their diverse chemical and physical properties for various process applications in order to reduce cost of ownership and improve uptime of the process equipment in which seals are incorporated. Furthermore, this Document establishes terminology that enables communication among equipment users, suppliers, OEMs, and seal manufacturers especially when actual performance of the equipment is being discussed. Finally, this Document provides information on proper seal cleanliness, packaging, and handling aimed to maintain optimum seal performance.
This Guide is applicable to the use of seals in operating environments used in the fabrication of semiconductor devices. This Guide will aid in defining the criteria by which sealing performance can be judged in comparable measurements and seal materials can be chosen.
Referenced SEMI Standards
SEMI C3 — Specifications for Gases
SEMI D9 — Definitions for Flat Panel Display Substrates
SEMI E45 — Test Method for the Determination of Inorganic Contamination from Minienvironments Using Vapor Phase Decomposition-Total Reflection X-Ray Spectroscopy (VPD-TXRF), VPD-Atomic Absorption Spectroscopy (VPD-AAS), or VPD/Inductively Coupled Plasma-Mass Spectrometry (VPD/ICP-MS)
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI F21 — Classification of Airborne Molecular Contaminant Levels in Clean Environments
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
SEMI F57 — Specification of Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI F61 — Guide for Ultrapure Water Systems Used in Semiconductor Processing
SEMI F75 — Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
SEMI P5 — Specification for Pellicles
SEMI S4 — Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets