SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing -

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Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI F52-1101 - Inactive



This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on August 2001; to be published November 2001. Originally published June 2000.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This document defines sizes and their measurement methods of metric tetrafluoroethylene perfluoroalkylvinyl-ether copolymer (PFA) tubes for liquid chemical distribution in semiconductor and flat panel display manufacturing equipment and facilities.


This document applies to metric tubes made from PFA.


Referenced SEMI Standards


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