SEMI F53 - Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at and in April 2012; originally published June 2000; previously published March 2007.


NOTICE: This Document was reapproved with minor editorial changes.


The purpose of this Document is to define a structured method for testing and evaluating the electromagnetic susceptibility of thermal mass flow controllers (MFCs).


This Document contains the requirements and test method that can be used to evaluate whether a thermal MFC will maintain its functional characteristics when subjected to EMI levels typical of the industry. The test method covers both the radiated susceptibility (RS) and conducted susceptibility (CS) of the controller when exposed to EMI. The electromagnetic susceptibility requirements are extracted from MIL-STD-461C and SAMA PMC-33.1, and the test method is a composite of the RS03, CS01, CS02, and CS06 test methods defined in MIL-STD 462.


Referenced SEMI Standards


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