SEMI F53 - Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers
The purpose of this Document is to define a structured method for testing and evaluating the electromagnetic susceptibility of mass flow controllers (MFCs).
This Document contains the requirements and test method that can be used to evaluate whether an MFC will maintain its functional characteristics when subjected to electromagnetic interference (EMI) levels typical of the industry. The test method covers both the radiated susceptibility (RS) and conducted susceptibility (CS) of the MFC when exposed to EMI. The electromagnetic susceptibility requirements are extracted from MIL-STD-461G, and the test method is a composite of the RS103, and CS106 test methods defined in MIL-STD 461G.
Referenced SEMI Standards