SEMI F55 - Test Method for Determining the Corrosion Resistance of Mass Flow Controllers
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 6, 2018. Available at www.semiviews.org and www.semi.org in December 2018; originally published June 2000; previously published April 2012.
A mass flow controller (MFC) is often used to control corrosive gases under unfavorable conditions. This Test Method is intended to help differentiate between MFC designs on the basis of relative resistance to corrosion-induced failure.
This test is intended to show the effect of corrosion caused when a corrosive gas such as HCl is contaminated by an oxidizer such as atmospheric moisture. For the purpose of this test HCl is the preferred test gas, however this test can also be performed with other gasses. This Test Method describes a corrosive gas exposure test for MFCs. The test is intended to accelerate the corrosion while simulating conditions that may be found within process equipment and gas systems in the semiconductor industry. As the relationship between corrosion and performance may differ with MFC design, corrosion is not measured directly. The effects of corrosion are detected by observing changes in MFC calibration and other operating parameters.
Referenced SEMI Standards
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
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