SEMI F56 - Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in September 2018; originally published June 2000; previously published April 2012.
NOTICE: This Document was completely rewritten in 2018.
The purpose of this Document is to define a method for characterizing mass flow controllers (MFCs) being considered for installation into a high-purity gas delivery system. This method will quantify the steady-state supply voltage effects on the MFC’s ability to accurately deliver set point flow values.
This procedure applies to MFCs. It is intended to measure the delivered mass flow rate variation as a function of deviation from the reference steady-state supply voltage.
The Test Method is designed for DC-powered MFCs. The supply voltage effects include voltage depression and over-voltage variations in the DC supply.
The user of an MFC can use the data generated by this method to evaluate the impact of steady-state supply voltage variations on the MFC’s ability to deliver set point flow values. Knowing the magnitude of this effect and the power level variations allows the user to decide on what measures to take to reduce this effect, if necessary.
Referenced SEMI Standards