SEMI F57 - Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
This Document specifies minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultrapure water (UPW) in UPW distribution systems. Further information regarding UPW systems can be found in SEMI F61.
It also provides recommendations for the use of polymer materials and components used in UHP liquid chemical distribution systems (LCDS). Such distribution systems covered in this Document include bulk supply, facility distribution, and process equipment applications.
Although the requirements of this Document focus on testing materials and components with UPW at elevated temperatures, there could be other applicable chemicals, such as caustics and oxidizers, which users of this Document might like to consider. However, defining the vast number of testing parameters for each possible liquid chemistry stream is beyond the scope of this Document. Nevertheless, this Document intends neither to exclude nor to limit the possibility that suppliers and end-users might test with chemicals other than UPW or with other temperature conditions and, at the same time, set their own internal limits separate from the requirements within this Document.
This Specification focuses on polymer material and component performance and validation. Operational requirements to ensure polymer materials and components meet the intent of this Document are provided where appropriate. A summary list follows:
Quantitative Measures of Compliance
- Particle Contribution Limits
- Metallic Contribution Limits
- Ionic Contribution Limits
- Total Organic (Oxidizable) Carbon Contribution Limits
- Surface Roughness Limits
Qualitative Measures of Compliance
- Mechanical Properties
- Physical Properties
- Chemical Resistance
- Traceability Requirements
- Packaging Requirements
Polymer materials and components consisting of but not limited to the items shown in Table 1 are designed to contain and supply the following types of liquid chemicals:
- Acids, bases and oxidizers
- Aqueous salt solutions
Polymer materials and components that meet the requirements specified in this Document shall be considered suitable for UPW and LCDS as described in ¶ 1.3.
Unless purchased separately, polymer components constructed of sub-pieces, such as O-rings, gaskets, and diaphragms, must meet the requirements of this Document at the functional component level, not as individual sub-pieces. For example an o-ring in a union must not degrade the overall quality of the union such that it fails to meet the requirements of this Document. Alternative spare parts used in direct fluid contact and purchased separately, such as gaskets and o-rings, must meet this Standard, if applicable.
Leach out tests and associated requirements referenced within this Document provide values from static conditions.
This Document and associated tests specify wetted stream performance requirements for polymer components in an as supplied, native state and reflect the current process on record for the polymer component manufacturers.
Referenced SEMI Standards
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI F40 — Practice For Preparing Liquid Chemical Distribution Components for Chemical Testing
SEMI F61 — Guide for Ultrapure Water Systems Used in Semiconductor Processing
SEMI F104 — Particle Test Method Guidelines for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment