F05800 - SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008. Originally published October 2000.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This document describes the procedure for determination of the moisture dry-down characteristics (quantity of removable moisture) of surface mount and conventional gas distribution systems (integrated gas distribution systems). APIMS is currently the method of choice for such dynamic tests because it is the commercially available technique capable of ppt moisture analysis with the fastest response time. This test method may provide guidelines for the application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time.


The results of this test can be used for qualitative ranking of gas delivery system based on the design. It can also be used by a sufficiently sophisticated user as input for numerical simulation of a gas distribution system behavior.


This test method applies to all types of surface mount and conventional gas distribution systems used in semiconductor processing.


Test Medium — The test procedure will be carried out in nitrogen. Other "inert" gases will have different purging characteristics and may dry a system more quickly or slowly. Reactive gases may react chemically with moisture. Considerations relating to corrosion resistance are outside the scope of the present document, although the test procedure may prove useful in corrosion studies. The results will provide a ranking with respect to moisture contribution arising as a result of differences in design, which may be applied with due caution to systems intended for use in other gas applications.


Operating Situations — Moisture contribution from a gas delivery system may be the result of contamination arising in its manufacture, or from subsequent exposure to ambient air or non-dry gas. Thus, it is necessary to consider two main situations:


The "initial dry-down" situation, which is determined by the moisture content of the components in the system (as received) with the effects of manufacturing process and design, surface quality, pre-treatment and packaging convoluted together.


The "response to upset" situation, which is determined by the amount of moisture taken up by the system and subsequently released in any exposure after receipt.


Referenced SEMI Standards

SEMI C15 — Test Method for ppm and ppb Humidity Standards

SEMI F27 — Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)

SEMI F33 — Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)

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