SEMI F59 - Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in June 2013. Originally published October 2000; previously published November 2008.
NOTICE: This Document was completely rewritten in 2002.
The purpose of this Document is to define a method for testing filters or gas systems being considered for installation into a high-purity gas distribution system or on semiconductor manufacturing equipment, respectively. Application of this Test Method is expected to yield comparable data among filters or gas systems.
This Document establishes a test method for preparing a pressure drop versus flow rate curves for filters and gas systems.
This procedure applies to clean filters including those cartridges of metal, ceramic and membrane construction. The pressure drops for integral housing/cartridge combination units are determined as a single set of values. For housings with removable filter cartridges, the flow curves of the housing and housing/cartridge combination are determined separately.
This procedure applies to high-purity gas systems. This procedure applies to face-seal, surface mount—modular, and monolithic integrated gas systems.
Referenced SEMI Standards
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