SEMI F60 - Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components -

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Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI F60-1214 - Current



This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25, 2014. Available at and in December 2014; originally published March 2001; previously published June 2011.


The purpose of this Document is to define a method for testing passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system. Application of this Test Method is expected to yield comparable results among components tested for the purposes of qualification for this installation.


This Document defines a method of testing the interior surfaces of stainless steel tubing, fittings, valves, and other components to determine the surface composition and chemistry, as a measure of the effectiveness of passivation processes.


The objective of this method is to describe a general set of instrument parameters and conditions that will achieve precise and reproducible measurements of important surface chemistry within the chromium-enriched oxide layer.


This Document describes a test method to characterize ‘as received’ surface composition and chemistry encompassing all chromium-enriched stainless steel surfaces in tubing, fittings, valves, and other components. This procedure involves measurement of total Cr/Fe ratios, CrOX/FeOX oxide species ratios, and the surface elemental compositions by electron spectroscopy for chemical analysis (ESCA), also called X-ray photoelectron spectroscopy (XPS).


This Document also describes the test method for a compositional ESCA depth profile measurement for Cr, Fe, Ni, O and C from the as-received surface, through the oxide layers, and extending into the base metal. The depth profile measurement evaluates the oxide thickness and the relative composition throughout the modified surface layer as a result of the passivation process.


Referenced SEMI Standards

SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components

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