SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects -

Abstract

This Standard defines a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFC’s indicated and actual flow.

This Test Method applies to metal and polymer sealed MFCs. The tests include those listed below and are to be performed in the following order:
1. Ambient Temperature Effects (Steady State and Transient)
2. Gas Temperature Effects (Steady State and Transient)

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI F62-1123 (technical revision)
SEMI F62-1016 (technical revision)
SEMI F62-0701 (Reapproved 1111)
SEMI F62-0701 (Reapproved 0307)
SEMI F62-0701 (first published)

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.