SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects -
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in October 2016; originally published July 2001; previously published November 2011.
The purpose of this Document is to define a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFC’s indicated and actual flow.
This Test Method applies to metal and polymer sealed MFCs with flow rates up to 30 slpm. The tests include those listed below and are to be performed in the following order:
- Ambient Temperature Effects (Steady State and Transient)
- Gas Temperature Effects (Steady State and Transient)
Referenced SEMI Standards
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