SEMI F64 - Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www.semiviews.org and www.semi.org in March 2018; originally published July 2001; previously published November 2011.
The purpose of this Document is to define a method for characterizing a mass flow controller (MFC) being considered for installation into a gas distribution system. This Test Method will quantify the effect of transient and steady state inlet and outlet pressure conditions on the performance of the MFC.
This Document provides a common basis for communication between manufacturers and users regarding testing and describing MFC pressure effects.
This Test Method measures the upstream (inlet) and downstream (outlet) transient pressure influences on indicated and actual flow.
This Test Method yields the results of actual output flow versus MFC set point and indicated flow as influenced by steady state inlet pressure.
This Test Method applies to MFCs with maximum flow ranges of up to 1000 sccm.
Referenced SEMI Standards