SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www.semi.org September 2001; to be published November 2001.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This document specifies dimensions of mounting base and their clearance hole sizes for bolts and the hole locations of diaphragm valves used with metric tetrafluoroethylene perfluoroalkylvinylether copolymer (PFA) tubes in liquid chemical distribution facilities and process equipment for semiconductor and flat panel display manufacturing.
To avoid any disturbance of future development and to facilitate interchangeability of diaphragm valves, this document has a limited scope as specified in § 2.
This document applies to mounting bases for two way valves with a diaphragm designed to shut off and/or regulate a liquid chemical flow in tubes whose sizes are listed in Table 1.
The valves are made from materials such as polytetrafluoroethylene (PTFE) or PFA, which have high corrosion resistance and low contamination contribution to the fluid.
Referenced SEMI Standards