SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals
This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www.semi.org September 2001; to be published November 2001.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This document specifies port marking and symbol of stainless steel vessels for liquid chemicals used in semiconductor and flat panel display manufacturing equipment and liquid chemical distribution facilities.
This document covers stainless steel vessels with tubes that penetrate into the vessels as inlets or outlets of liquid chemical to/from the vessels.
A vessel which uses coupling (quick coupling) at its tube end (port) is excepted from the scope.
Referenced SEMI Standards