SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in July 2013; originally published November 2001; previously published November 2008.
The purpose of this Document is to define a test method to quantify impurity removal capacity of inert gas purifiers.
To determine the impurity capacity of a gas purifier at the point of breakthrough. Capacity tests are done by adding ppm levels of a given gaseous impurity to a pure zero gas and monitoring the effluent of the test purifier for active impurity species.
This Document is intended for point of use (POU) inert gas purifiers where inlet purity is 99.9995% or higher.
Referenced SEMI Standards
SEMI E29 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI F22 — Guide for Gas Distribution Systems
SEMI F33 — Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)