SEMI F68 - Test Method for Determining Purifier Efficiency -

Abstract

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in July 2013; originally published November 2001; previously published November 2008.

　

The purpose of this document is to define a test method to quantify the efficiency of a purifier for removal of an active gaseous impurity from a matrix gas.

　

To determine the efficiency of a gas purifier to remove a given impurity species. Efficiency tests are performed by adding ppm levels of gaseous impurities to a pure matrix gas and monitoring the effluent of the test purifier for active impurity species. Tests are done at supplier recommended flow rate, operating temperature and pressure.

　

To establish a method of determining instantaneous purifier efficiency.

　

The test method applies to point of use (POU) and large scale purifiers.

　

This method is for UHP efficient removal of low-level contaminants.

　

Referenced SEMI Standards

SEMI E29 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI F22 — Guide for Gas Distribution Systems
SEMI F33 — Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)

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