SEMI F69 - Test Method for Transport and Shock Testing of Gas Delivery Systems
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www.semiviews.org and www.semi.org in December 2013; originally published March 2002; previously published July 2008.
E This Standard was editorially modified in October 2017. A change was made to correct a nonconforming title per the Procedure Manual, Appendix 4.
This Document provides test methods for qualifying the mechanical integrity of gas delivery systems through vibration and shock testing.
The test methods recommended herein provide for vibration (transport simulation) and shock testing of gas delivery systems (including conventional and surface-mount) for semiconductor processing.
The test methods recommended herein apply to gas delivery systems not crated or packaged for shipment. Specifically, the test methods are to be applied to the assembled and interconnected gas delivery components and their associated mounting panel (backplane), with or without a sheet metal enclosure.
For the purpose of this Guideline, transportation vibration, and its simulation, are expectedly more severe than in-use vibrational levels. Thus the transportation simulation test is considered acceptable to assess mechanical integrity adequate for both shipment and life-cycle vibrational stress of the gas delivery systems.
The intent of the shock test is to provide further assessment of equipment malfunction that may result from shocks experienced during unpacking, installation, or use in the field.
Successful completion of the tests recommended herein is a recommended metric of mechanical integrity for gas delivery systems architecture, design, and assembly techniques.
Referenced SEMI Standards
SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components