SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System
NOTICE: The designation of SEMI F70 was updated during the 0320 publishing cycle to reflect the creation of SEMI F70.1.
The purpose of this Document is to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system in terms of number of particles added to gas flowing through the system. This standardized procedure is intended to be used commonly by the gas delivery system suppliers, equipment suppliers, and end-users.
This Test Method applies to surface mount and conventional gas delivery systems used in semiconductor manufacturing equipment.
SEMI F70.1-0320 — Test Method for Determination of Particle Contribution of Gas Delivery System and Its Components Through Pulsed Testing
Referenced SEMI Standards
SEMI C57 — Specification for Argon
SEMI C59 — Specification for Nitrogen